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Coatings 2019, 9(2), 125; https://doi.org/10.3390/coatings9020125

Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions

1
Department of Materials Science, Technische Universität Darmstadt, 64287 Darmstadt, Germany
2
SANNO Co., Ltd., Yokohama 223-0052, Japan
*
Author to whom correspondence should be addressed.
Received: 31 December 2018 / Revised: 14 February 2019 / Accepted: 15 February 2019 / Published: 18 February 2019
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Abstract

A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness. View Full-Text
Keywords: diamond-like carbon; surface morphology; deposition; metal; etching; dealloying; nanostructures diamond-like carbon; surface morphology; deposition; metal; etching; dealloying; nanostructures
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Hatada, R.; Flege, S.; Rimmler, B.; Dietz, C.; Ensinger, W.; Baba, K. Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions. Coatings 2019, 9, 125.

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