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Coatings 2019, 9(2), 108; https://doi.org/10.3390/coatings9020108

Structure, Mechanical and Tribological Properties of MoSN/MoS2 Multilayer Films

1
College of Chemistry and Chemical Engineering, Northwest Normal University, Lanzhou 730070, China
2
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
3
College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou 730050, China
4
National United Engineering Laboratory for Advanced Bearing Tribology, Henan University of Science and Technology, Kaifeng 475001, China
*
Authors to whom correspondence should be addressed.
Received: 26 December 2018 / Revised: 1 February 2019 / Accepted: 6 February 2019 / Published: 10 February 2019
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Abstract

MoSN/MoS2 multilayer films were deposited by a sputtering MoS2 target in alternate Ar and Ar/N2 mixed atmospheres with different nitrogen flow rates. The influence of nitrogen flow rates on the microstructure, mechanical and tribological properties of the prepared films were investigated. The multilayer film exhibited the preferred orientation of (002) plane for MoS2 sublayers and amorphous structure for MoSN sublayers. Introducing N2 into the source gas resulted in a much more compact structure for multilayer films due to the suppression of columnar growth of MoS2 film. With the increase of the nitrogen flow rate, the hardness of the multilayer film firstly increased from 2.3 to 10.5 GPa as the nitrogen flow rate increased from 4 to 10 sccm and then turned downwards to 6.5 GPa at 20 sccm. MoSN/MoS2 film deposited with an optimized microstructure exhibited low friction coefficients below 0.03 and a wear life higher than 1.8×105 revolutions in vacuum. Meanwhile, the optimized film showed an ultralow friction coefficient of 0.004~0.01 and wear rate of 4.7 × 10−7 mm3/N·m in an ultrahigh vacuum. Both the enhanced hardness by N-doping and sustainable formed MoS2 tribofilm contributed to the improved tribological property of MoSN/MoS2 multilayer film. View Full-Text
Keywords: multilayer film; nitrogen flow rate; film structure; ultralow friction multilayer film; nitrogen flow rate; film structure; ultralow friction
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Fu, Y.; He, T.; Yang, W.; Xu, J.; Mu, B.; Pang, X.; Wang, P. Structure, Mechanical and Tribological Properties of MoSN/MoS2 Multilayer Films. Coatings 2019, 9, 108.

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