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Journal: Coatings, 2018
Volume: 8
Number: 289
Article:
Magnetron Sputtered AlN Layers on LTCC Multilayer and Silicon Substrates
Authors:
by
Heike Bartsch, Rolf Grieseler, Jose Mánuel, Jörg Pezoldt and Jens Müller
Link:
https://www.mdpi.com/2079-6412/8/8/289
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