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Open AccessArticle

Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection

Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi’an Technological University, Xi’an 710032, China
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610000, China
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Coatings 2018, 8(5), 192;
Received: 8 April 2018 / Revised: 2 May 2018 / Accepted: 8 May 2018 / Published: 21 May 2018
(This article belongs to the Special Issue Applications of Optical Thin Film Coatings)
PDF [2789 KB, uploaded 21 May 2018]


A micro-pyramid structured thin film with a broad-band infrared antireflection property is designed and fabricated by using the single-point diamond turning (SPDT) technique and combined with nano-imprint lithography (NIL). A structure with dimensions of 10 μm pitch and 5 μm height is transferred from the copper mold to the silicon nitride optical film by using NIL and proportional inductively-coupled plasma (ICP) etching. Reflectance of the micro-optical surface is reduced below 1.0% over the infrared spectral range (800–2500 nm). A finite-difference-time-domain (FDTD) analysis indicates that this micro-structure can localize photons and enhance the absorption inside the micro-pyramid at long wavelengths. As described above, the micro-pyramid array has been integrated in an optical film successfully. Distinguishing from the traditional micro-optical components, considering the effect of refraction and diffraction, it is a valuable and flexible method to take account of the interference effect of optical film. View Full-Text
Keywords: single-point diamond turning; nano-imprint lithography; micro-pyramid; micro-optics single-point diamond turning; nano-imprint lithography; micro-pyramid; micro-optics

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Ge, S.; Liu, W.; Zhou, S.; Li, S.; Sun, X.; Huang, Y.; Yang, P.; Zhang, J.; Lin, D. Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection. Coatings 2018, 8, 192.

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