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Open AccessArticle

Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection

1
Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi’an Technological University, Xi’an 710032, China
2
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610000, China
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Coatings 2018, 8(5), 192; https://doi.org/10.3390/coatings8050192
Received: 8 April 2018 / Revised: 2 May 2018 / Accepted: 8 May 2018 / Published: 21 May 2018
(This article belongs to the Special Issue Applications of Optical Thin Film Coatings)
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Abstract

A micro-pyramid structured thin film with a broad-band infrared antireflection property is designed and fabricated by using the single-point diamond turning (SPDT) technique and combined with nano-imprint lithography (NIL). A structure with dimensions of 10 μm pitch and 5 μm height is transferred from the copper mold to the silicon nitride optical film by using NIL and proportional inductively-coupled plasma (ICP) etching. Reflectance of the micro-optical surface is reduced below 1.0% over the infrared spectral range (800–2500 nm). A finite-difference-time-domain (FDTD) analysis indicates that this micro-structure can localize photons and enhance the absorption inside the micro-pyramid at long wavelengths. As described above, the micro-pyramid array has been integrated in an optical film successfully. Distinguishing from the traditional micro-optical components, considering the effect of refraction and diffraction, it is a valuable and flexible method to take account of the interference effect of optical film. View Full-Text
Keywords: single-point diamond turning; nano-imprint lithography; micro-pyramid; micro-optics single-point diamond turning; nano-imprint lithography; micro-pyramid; micro-optics
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Ge, S.; Liu, W.; Zhou, S.; Li, S.; Sun, X.; Huang, Y.; Yang, P.; Zhang, J.; Lin, D. Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection. Coatings 2018, 8, 192.

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