Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection
AbstractA micro-pyramid structured thin film with a broad-band infrared antireflection property is designed and fabricated by using the single-point diamond turning (SPDT) technique and combined with nano-imprint lithography (NIL). A structure with dimensions of 10 μm pitch and 5 μm height is transferred from the copper mold to the silicon nitride optical film by using NIL and proportional inductively-coupled plasma (ICP) etching. Reflectance of the micro-optical surface is reduced below 1.0% over the infrared spectral range (800–2500 nm). A finite-difference-time-domain (FDTD) analysis indicates that this micro-structure can localize photons and enhance the absorption inside the micro-pyramid at long wavelengths. As described above, the micro-pyramid array has been integrated in an optical film successfully. Distinguishing from the traditional micro-optical components, considering the effect of refraction and diffraction, it is a valuable and flexible method to take account of the interference effect of optical film. View Full-Text
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Ge, S.; Liu, W.; Zhou, S.; Li, S.; Sun, X.; Huang, Y.; Yang, P.; Zhang, J.; Lin, D. Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection. Coatings 2018, 8, 192.
Ge S, Liu W, Zhou S, Li S, Sun X, Huang Y, Yang P, Zhang J, Lin D. Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection. Coatings. 2018; 8(5):192.Chicago/Turabian Style
Ge, Shaobo; Liu, Weiguo; Zhou, Shun; Li, Shijie; Sun, Xueping; Huang, Yuetian; Yang, Pengfei; Zhang, Jin; Lin, Dabin. 2018. "Design and Preparation of a Micro-Pyramid Structured Thin Film for Broadband Infrared Antireflection." Coatings 8, no. 5: 192.
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