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Coatings 2018, 8(2), 78; https://doi.org/10.3390/coatings8020078

Chemical Vapor Transport Deposition of Molybdenum Disulfide Layers Using H2O Vapor as the Transport Agent

College of Materials & Environmental Engineering, Hangzhou Dianzi University, Hangzhou 310018, China
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Received: 8 January 2018 / Revised: 11 February 2018 / Accepted: 14 February 2018 / Published: 21 February 2018
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Abstract

Molybdenum disulfide (MoS2) layers show excellent optical and electrical properties and have many potential applications. However, the growth of high-quality MoS2 layers is a major bottleneck in the development of MoS2-based devices. In this paper, we report a chemical vapor transport deposition method to investigate the growth behavior of monolayer/multi-layer MoS2 using water (H2O) as the transport agent. It was shown that the introduction of H2O vapor promoted the growth of MoS2 by increasing the nucleation density and continuous monolayer growth. Moreover, the growth mechanism is discussed. View Full-Text
Keywords: chemical vapor transport deposition; molybdenum disulfide; monolayer; water; mechanism chemical vapor transport deposition; molybdenum disulfide; monolayer; water; mechanism
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Zhao, S.; Weng, J.; Jin, S.; Lv, Y.; Ji, Z. Chemical Vapor Transport Deposition of Molybdenum Disulfide Layers Using H2O Vapor as the Transport Agent. Coatings 2018, 8, 78.

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