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Journal: Coatings, 2025
Volume: 15
Number: 793
Article:
Influence of Si Content on the Microstructure and Properties of Hydrogenated Amorphous Carbon Films Deposited by Magnetron Sputtering Technique
Authors:
by
Zhen Yu, Jiale Shang, Qingye Wang, Haoxiang Zheng, Haijuan Mei, Dongcai Zhao, Xingguang Liu, Jicheng Ding and Jun Zheng
Link:
https://www.mdpi.com/2079-6412/15/7/793
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