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Journal: Coatings, 2025
Volume: 15
Number: 700
Article:
Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms
Authors:
by
Jingyu Pan, Dongsheng Zhang, Shijie Liu, Jianguo Wang and Jianda Shao
Link:
https://www.mdpi.com/2079-6412/15/6/700
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