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Journal: CoatingsVolume: 15Number: 700
Article: Optimization of Film Thickness Uniformity in Hemispherical Resonator Coating Process Based on Simulation and Reinforcement Learning Algorithms
  • Authors:
  • Jingyu Pan1,2,
  • Dongsheng Zhang1,* and
  • Shijie Liu2,*
  • et al.
Link: https://www.mdpi.com/2079-6412/15/6/700

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