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Journal: Coatings, 2024
Volume: 14
Number: 808

Article: Rate-Dependent Evolution of Microstructure and Stress in Silicon Films Deposited by Electron Beam Evaporation
Authors: by Runar Plünnecke Dahl-Hansen, Marit Stange, Tor Olav Sunde and Alexander Ulyashin
Link: https://www.mdpi.com/2079-6412/14/7/808

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