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Journal: Coatings, 2024
Volume: 14
Number: 279

Article: A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering
Authors: by Nivin Alktash, Stefan Körner, Tianhao Liu, Andreas Pflug, Bernd Szyszka and Ruslan Muydinov
Link: https://www.mdpi.com/2079-6412/14/3/279

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