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Journal: Coatings, 2024
Volume: 14
Number: 82
82
Article: Preparation of Alumina Thin Films by Reactive Modulated Pulsed Power Magnetron Sputtering with Millisecond Pulses
Authors: by Alexander V. Tumarkin, Dobrynya V. Kolodko, Maksim M. Kharkov, Tatiana V. Stepanova, Andrey V. Kaziev, Nikolay N. Samotaev and Konstantin Yu. Oblov
Link: https://www.mdpi.com/2079-6412/14/1/82

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