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Journal: Coatings, 2023
Volume: 13
Number: 558
Article:
Multiscale CFD Modeling of Area-Selective Atomic Layer Deposition: Application to Reactor Design and Operating Condition Calculation
Authors:
by
Sungil Yun, Henrik Wang, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas and Panagiotis D. Christofides
Link:
https://www.mdpi.com/2079-6412/13/3/558
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