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Journal: Coatings, 2023
Volume: 13
Number: 2094

Article: Chemisorption and Surface Reaction of Hafnium Precursors on the Hydroxylated Si(100) Surface
Authors: by Truong Ba Tai, Jonghun Lim and Hyeyoung Shin
Link: https://www.mdpi.com/2079-6412/13/12/2094

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