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Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles
 
 

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Journal: Coatings, 2023
Volume: 13
Number: 1932

Article: Tantalum Oxide Thin Films Sputter-Deposited by Oxygen Gas Pulsing
Authors: by Nicolas Martin, Jean-Marc Cote, Joseph Gavoille and Valérie Potin
Link: https://www.mdpi.com/2079-6412/13/11/1932

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