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Journal: Coatings, 2023
Volume: 13
Number: 1787
1787
Article: Large Transfer of Nitrogen, Silicon and Titanium through Various Thin Mo–Ti/Si and Ti–Mo/Si Bilayer Films Processed in Expanding Microwave Plasma: Formation of Nitrides and Silicides
Authors: by Isabelle Jauberteau, Richard Mayet, Julie Cornette, Pierre Carles, Denis Mangin, Annie Bessaudou, Jean Louis Jauberteau and Armand Passelergue
Link: https://www.mdpi.com/2079-6412/13/10/1787

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