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Journal: Coatings, 2023
Volume: 13
Number: 48
Article:
A Study on the Gap-Fill Process Deposited by the Deposition/Etch/Deposition Method in the Space-Divided PE-ALD System
Authors:
by
Baek-Ju Lee, Dong-Won Seo and Jae-Wook Choi
Link:
https://www.mdpi.com/2079-6412/13/1/48
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