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Journal: Coatings, 2023
Volume: 13
Number: 104
Article:
The Effect of Deposition Temperature of TiN Thin Film Deposition Using Thermal Atomic Layer Deposition
Authors:
by
Baek-Ju Lee, Yoo-Seong Kim, Dong-Won Seo and Jae-Wook Choi
Link:
https://www.mdpi.com/2079-6412/13/1/104
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