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Journal: Coatings, 2022
Volume: 12
Number: 1253

Article: Influence of Airflow Disturbance on the Uniformity of Spin Coating Film Thickness on Large Area Rectangular Substrates
Authors: by Qiuyu Liu, Ying Yan, Lei Meng, Zhengyu Zhang and Ping Zhou
Link: https://www.mdpi.com/2079-6412/12/9/1253

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