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Journal: Coatings, 2022
Volume: 12
Number: 1220
Article:
Adhesion Strength of Amorphous Carbon Films Deposited on a Trench Sidewall
Authors:
by
Kyohei Toyoshima, Abdelrahman Farghali and Junho Choi
Link:
https://www.mdpi.com/2079-6412/12/8/1220
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