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Journal: Coatings, 2022
Volume: 12
Number: 597
Article:
Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions
Authors:
by
Siqi Zhao, Jiulong Wang, Guoguo Yan, Zhanwei Shen, Wanshun Zhao, Lei Wang and Xingfang Liu
Link:
https://www.mdpi.com/2079-6412/12/5/597
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