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Journal: Coatings, 2022
Volume: 12
Number: 597

Article: Surface Uniformity of Wafer-Scale 4H-SiC Epitaxial Layers Grown under Various Epitaxial Conditions
Authors: by Siqi Zhao, Jiulong Wang, Guoguo Yan, Zhanwei Shen, Wanshun Zhao, Lei Wang and Xingfang Liu
Link: https://www.mdpi.com/2079-6412/12/5/597

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