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Journal: Coatings, 2022
Volume: 12
Number: 1767
1767
Article: Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor
Authors: by Evgeniya Ermakova, Konstantin Mogilnikov, Igor Asanov, Anastasiya Fedorenko, Irina Yushina, Vadim Kichay, Eugene Maksimovskiy and Marina Kosinova
Link: https://www.mdpi.com/2079-6412/12/11/1767

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