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Journal: Coatings, 2021
Volume: 11
Number: 355
Article:
Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films
Authors:
by
Xinzhi Li, Marko Vehkamäki, Mikko Heikkilä, Miika Mattinen, Matti Putkonen, Markku Leskelä and Mikko Ritala
Link:
https://www.mdpi.com/2079-6412/11/3/355
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