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Journal: Coatings, 2021
Volume: 11
Number: 355

Article: Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films
Authors: by Xinzhi Li, Marko Vehkamäki, Mikko Heikkilä, Miika Mattinen, Matti Putkonen, Markku Leskelä and Mikko Ritala
Link: https://www.mdpi.com/2079-6412/11/3/355

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