Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon
Abstract
1. Introduction
2. Materials and Methods
2.1. ZnO Thin Film Deposition
2.2. Fabrication of ZnO Micropatterns by UV-Lithography
2.3. Fabrication of Spongy Nanostructured PSi
2.4. Characterization Techniques
3. Results and Discussion
3.1. Photoluminescence Properties of PSi and ZnO Layers
3.2. ZnO + PSi Surface Micropatterns
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Ramadan, R.; Torres-Costa, V.; Martín-Palma, R.J. Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon. Coatings 2020, 10, 529. https://doi.org/10.3390/coatings10060529
Ramadan R, Torres-Costa V, Martín-Palma RJ. Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon. Coatings. 2020; 10(6):529. https://doi.org/10.3390/coatings10060529
Chicago/Turabian StyleRamadan, Rehab, Vicente Torres-Costa, and Raúl J. Martín-Palma. 2020. "Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon" Coatings 10, no. 6: 529. https://doi.org/10.3390/coatings10060529
APA StyleRamadan, R., Torres-Costa, V., & Martín-Palma, R. J. (2020). Fabrication of Zinc Oxide and Nanostructured Porous Silicon Composite Micropatterns on Silicon. Coatings, 10(6), 529. https://doi.org/10.3390/coatings10060529