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Journal: Coatings, 2020
Volume: 10
Number: 443

Article: Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering
Authors: by Ji-Hye Kwon, Du-Yun Kim and Nong-Moon Hwang
Link: https://www.mdpi.com/2079-6412/10/5/443

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