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Journal: Coatings, 2020
Volume: 10
Number: 443
Article:
Generation of Charged Ti Nanoparticles and Their Deposition Behavior with a Substrate Bias during RF Magnetron Sputtering
Authors:
by
Ji-Hye Kwon, Du-Yun Kim and Nong-Moon Hwang
Link:
https://www.mdpi.com/2079-6412/10/5/443
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