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Journal: Coatings, 2020
Volume: 10
Number: 1252
Article:
Effects of the Nitrogen Flow Ratio and Substrate Bias on the Mechanical Properties of W–N and W–Si–N Films
Authors:
by
Li-Chun Chang, Ming-Ching Sung, Li-Heng Chu and Yung-I Chen
Link:
https://www.mdpi.com/2079-6412/10/12/1252
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