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Journal: Coatings, 2020
Volume: 10
Number: 1076
Article:
A Multi-Position Drum-Type Assembly for Simultaneous Film Deposition at Different Temperatures in a Single Sputter Cycle–Application to ITO Thin Films
Authors:
by
Akhmed K. Akhmedov, Abil S. Asvarov, Arsen E. Muslimov and Vladimir M. Kanevsky
Link:
https://www.mdpi.com/2079-6412/10/11/1076
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