Demonstrating a Filter-Free Wavelength Sensor with Double-Well Structure and Its Application
Abstract
:1. Introduction
2. Design and Principle
3. Fabrication
3.1. Device Simulation
3.2. Process Simulation and Fabrication
4. Experimental Results
4.1. Sensor Characteristics
4.1.1. Single Wavelength
4.1.2. Multiple Wavelength
4.2. Fluorescence Reagent
4.2.1. Measurement Configuration
4.2.2. Measurement Results
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Deep n-Well | p-Well | |
---|---|---|
Types of impurities | Phosphorus | Boron |
Dose [cm−2] | 1.0 × 1012 | 2.0 × 1012 |
Acceleration voltage [keV] | 150 | 80 |
Injection angle [deg] | 7 | 7 |
Drive-in time [min] | 1530 | 270 |
Drive-in temperature [°C] | 1150 | 1150 |
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Choi, Y.-J.; Nakano, K.; Ide, T.; Sakae, T.; Ichikawa, R.; Hizawa, T.; Akai, D.; Takahashi, K.; Noda, T.; Sawada, K. Demonstrating a Filter-Free Wavelength Sensor with Double-Well Structure and Its Application. Biosensors 2022, 12, 1033. https://doi.org/10.3390/bios12111033
Choi Y-J, Nakano K, Ide T, Sakae T, Ichikawa R, Hizawa T, Akai D, Takahashi K, Noda T, Sawada K. Demonstrating a Filter-Free Wavelength Sensor with Double-Well Structure and Its Application. Biosensors. 2022; 12(11):1033. https://doi.org/10.3390/bios12111033
Chicago/Turabian StyleChoi, Yong-Joon, Kakeru Nakano, Tomoya Ide, Tsugumi Sakae, Ryosuke Ichikawa, Takeshi Hizawa, Daisuke Akai, Kazuhiro Takahashi, Toshihiko Noda, and Kazuaki Sawada. 2022. "Demonstrating a Filter-Free Wavelength Sensor with Double-Well Structure and Its Application" Biosensors 12, no. 11: 1033. https://doi.org/10.3390/bios12111033