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Open AccessArticle

Measuring Device and Material ZT in a Thin-Film Si-Based Thermoelectric Microgenerator

Departament de Física, Universitat Autònoma de Barcelona, 08193 Cerdanyola del Vallès, Spain
Institut de Microelectrònica de Barcelona-Centro Nacional de Microelectrónica, CSIC, 08193 Cerdanyola del Vallès, Spain
Author to whom correspondence should be addressed.
Current address: IMEC, Kapeldreef 75, 3001 Leuven, Belgium.
Nanomaterials 2019, 9(4), 653;
Received: 31 March 2019 / Revised: 13 April 2019 / Accepted: 17 April 2019 / Published: 24 April 2019
(This article belongs to the Special Issue Nanostructured Materials for Thermoelectrics)
Thermoelectricity (TE) is proving to be a promising way to harvest energy for small applications and to produce a new range of thermal sensors. Recently, several thermoelectric generators (TEGs) based on nanomaterials have been developed, outperforming the efficiencies of many previous bulk generators. Here, we presented the thermoelectric characterization at different temperatures (from 50 to 350 K) of the Si thin-film based on Phosphorous (n) and Boron (p) doped thermocouples that conform to a planar micro TEG. The thermocouples were defined through selective doping by ion implantation, using boron and phosphorous, on a 100 nm thin Si film. The thermal conductivity, the Seebeck coefficient, and the electrical resistivity of each Si thermocouple was experimentally determined using the in-built heater/sensor probes and the resulting values were refined with the aid of finite element modeling (FEM). The results showed a thermoelectric figure of merit for the Si thin films of z T = 0.0093, at room temperature, which was about 12% higher than the bulk Si. In addition, we tested the thermoelectric performance of the TEG by measuring its own figure of merit, yielding a result of ZT = 0.0046 at room temperature. View Full-Text
Keywords: thermoelectric characterization; thermoelectric generator; Si thin films thermoelectric characterization; thermoelectric generator; Si thin films
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Ferrando-Villalba, P.; Pérez-Marín, A.P.; Abad, L.; Dalkiranis, G.G.; Lopeandia, A.F.; Garcia, G.; Rodriguez-Viejo, J. Measuring Device and Material ZT in a Thin-Film Si-Based Thermoelectric Microgenerator. Nanomaterials 2019, 9, 653.

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