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The Fabrication of Micro/Nano Structures by Laser Machining

by Liangliang Yang 1,2, Jiangtao Wei 1,3, Zhe Ma 1,2, Peishuai Song 1,3, Jing Ma 1,2, Yongqiang Zhao 1,2, Zhen Huang 1,2, Mingliang Zhang 1,2, Fuhua Yang 1,2,4,6 and Xiaodong Wang 1,2,4,5,6,*
1
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
3
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
4
Beijing Academy of Quantum Information Science, Beijing 100193, China
5
School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100190, China
6
Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2019, 9(12), 1789; https://doi.org/10.3390/nano9121789
Received: 11 November 2019 / Revised: 8 December 2019 / Accepted: 12 December 2019 / Published: 16 December 2019
Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed. View Full-Text
Keywords: micro/nano structures; micro/nano fabrication; femtosecond laser; laser machining; mental; semiconductor; material; application micro/nano structures; micro/nano fabrication; femtosecond laser; laser machining; mental; semiconductor; material; application
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Yang, L.; Wei, J.; Ma, Z.; Song, P.; Ma, J.; Zhao, Y.; Huang, Z.; Zhang, M.; Yang, F.; Wang, X. The Fabrication of Micro/Nano Structures by Laser Machining. Nanomaterials 2019, 9, 1789.

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