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Article

Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride

1
Fraunhofer Institute for Applied Solid State Physics IAF, Tullastraße 72, 79108 Freiburg, Germany
2
Department of Power Electronics, Institute of Sustainable Systems Engineering (INATECH), University of Freiburg, 79085 Freiburg, Germany
*
Author to whom correspondence should be addressed.
Nanomaterials 2017, 7(8), 226; https://doi.org/10.3390/nano7080226
Received: 31 July 2017 / Revised: 14 August 2017 / Accepted: 15 August 2017 / Published: 18 August 2017
(This article belongs to the Special Issue Graphene and Nanotube Based Devices)
The two-dimensional and virtually massless character of graphene attracts great interest for radio frequency devices, such as surface and bulk acoustic wave resonators. Due to its good electric conductivity, graphene might be an alternative as a virtually massless electrode by improving resonator performance regarding mass-loading effects. We report on an optimization of the commonly used wet transfer technique for large-area graphene, grown via chemical vapor deposition, onto aluminum nitride (AlN), which is mainly used as an active, piezoelectric material for acoustic devices. Today, graphene wet transfer is well-engineered for silicon dioxide (SiO2). Investigations on AlN substrates reveal highly different surface properties compared to SiO2 regarding wettability, which strongly influences the quality of transferred graphene monolayers. Both physical and chemical effects of a plasma treatment of AlN surfaces change wettability and avoid large-scale cracks in the transferred graphene sheet during desiccation. Spatially-resolved Raman spectroscopy reveals a strong strain and doping dependence on AlN plasma pretreatments correlating with the electrical conductivity of graphene. In our work, we achieved transferred crack-free large-area (40 × 40 mm2) graphene monolayers with sheet resistances down to 350 Ω/sq. These achievements make graphene more powerful as an eco-friendly and cheaper replacement for conventional electrode materials used in radio frequency resonator devices. View Full-Text
Keywords: graphene wet transfer; aluminum nitride; wettability; chemical vapor deposition; surface plasma treatment; graphene doping; CVD-graphene graphene wet transfer; aluminum nitride; wettability; chemical vapor deposition; surface plasma treatment; graphene doping; CVD-graphene
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MDPI and ACS Style

Knapp, M.; Hoffmann, R.; Cimalla, V.; Ambacher, O. Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride. Nanomaterials 2017, 7, 226. https://doi.org/10.3390/nano7080226

AMA Style

Knapp M, Hoffmann R, Cimalla V, Ambacher O. Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride. Nanomaterials. 2017; 7(8):226. https://doi.org/10.3390/nano7080226

Chicago/Turabian Style

Knapp, Marius, René Hoffmann, Volker Cimalla, and Oliver Ambacher. 2017. "Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride" Nanomaterials 7, no. 8: 226. https://doi.org/10.3390/nano7080226

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