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Journal: Nanomaterials, 2025
Volume: 15
Number: 947
947
Article: High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process
Authors: by Ke Zhang, Yunchu Yu, Nanfei Zhu, Senlin Zhang, Jie Sun, Shijin Ding and David Wei Zhang
Link: https://www.mdpi.com/2079-4991/15/12/947

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