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Journal: Nanomaterials, 2024
Volume: 14
Number: 127
127
Article: Mechanism Exploration of the Effect of Polyamines on the Polishing Rate of Silicon Chemical Mechanical Polishing: A Study Combining Simulations and Experiments
Authors: by Ziwei Lin, Junli Zhu, Qi Huang, Lei Zhu, Weimin Li and Wenjie Yu
Link: https://www.mdpi.com/2079-4991/14/1/127

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