Order Article Reprints

Lin Z, Zhu J, Huang Q, Zhu L, Li W, Yu W. Mechanism Exploration of the Effect of Polyamines on the Polishing Rate of Silicon Chemical Mechanical Polishing: A Study Combining Simulations and Experiments. Nanomaterials. 2024; 14(1):127. https://doi.org/10.3390/nano14010127

Lin, Ziwei, Junli Zhu, Qi Huang, Lei Zhu, Weimin Li, and Wenjie Yu. 2024. "Mechanism Exploration of the Effect of Polyamines on the Polishing Rate of Silicon Chemical Mechanical Polishing: A Study Combining Simulations and Experiments" Nanomaterials 14, no. 1: 127. https://doi.org/10.3390/nano14010127

Lin, Z., Zhu, J., Huang, Q., Zhu, L., Li, W., & Yu, W. (2024). Mechanism Exploration of the Effect of Polyamines on the Polishing Rate of Silicon Chemical Mechanical Polishing: A Study Combining Simulations and Experiments. Nanomaterials, 14(1), 127. https://doi.org/10.3390/nano14010127