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Journal: NanomaterialsVolume: 13Number: 2702
Article: Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone
- Authors:
- Mahtab Salari Mehr1,*,
- Lauri Aarik1 and
- Taivo Jõgiaas1
- et al.
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