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Journal: Nanomaterials, 2023
Volume: 13
Number: 2702

Article: Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone
Authors: by Mahtab Salari Mehr, Lauri Aarik, Taivo Jõgiaas, Aarne Kasikov, Elyad Damerchi and Hugo Mändar
Link: https://www.mdpi.com/2079-4991/13/19/2702

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