Salari Mehr, M.; Aarik, L.; Jõgiaas, T.; Kasikov, A.; Damerchi, E.; Mändar, H.
Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone. Nanomaterials 2023, 13, 2702.
https://doi.org/10.3390/nano13192702
AMA Style
Salari Mehr M, Aarik L, Jõgiaas T, Kasikov A, Damerchi E, Mändar H.
Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone. Nanomaterials. 2023; 13(19):2702.
https://doi.org/10.3390/nano13192702
Chicago/Turabian Style
Salari Mehr, Mahtab, Lauri Aarik, Taivo Jõgiaas, Aarne Kasikov, Elyad Damerchi, and Hugo Mändar.
2023. "Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone" Nanomaterials 13, no. 19: 2702.
https://doi.org/10.3390/nano13192702
APA Style
Salari Mehr, M., Aarik, L., Jõgiaas, T., Kasikov, A., Damerchi, E., & Mändar, H.
(2023). Mechanical and Optical Properties of Cr2O3 Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)3 and Ozone. Nanomaterials, 13(19), 2702.
https://doi.org/10.3390/nano13192702