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Journal: Nanomaterials, 2022
Volume: 12
Number: 969
969
Article: Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate
Authors: by Jun-Myeong Lee, Jong-Chan Lee, Seong-In Kim, Seung-Jae Lee, Jae-Yung Bae, Jin-Hyung Park and Jea-Gun Park
Link: https://www.mdpi.com/2079-4991/12/6/969

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