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Journal: Nanomaterials, 2022
Volume: 12
Number: 670
670
Article: The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates
Authors: by Ivan V. Nikolaev, Pavel V. Geydt, Nikolay G. Korobeishchikov, Aleksandr V. Kapishnikov, Vladimir A. Volodin, Ivan A. Azarov, Vladimir I. Strunin and Evgeny Y. Gerasimov
Link: https://www.mdpi.com/2079-4991/12/4/670

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