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Journal: Nanomaterials, 2022
Volume: 12
Number: 548
Article:
Effect of Process Temperature on Density and Electrical Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
Authors:
by
Hak-Gyeong Kim, Da-Hee Hong, Jae-Hoon Yoo and Hee-Chul Lee
Link:
https://www.mdpi.com/2079-4991/12/3/548
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