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Journal: Nanomaterials, 2022
Volume: 12
Number: 4256

Article: Atomic-Level Sn Doping Effect in Ga2O3 Films Using Plasma-Enhanced Atomic Layer Deposition
Authors: by Yi Shen, Hong-Ping Ma, Lin Gu, Jie Zhang, Wei Huang, Jing-Tao Zhu and Qing-Chun Zhang
Link: https://www.mdpi.com/2079-4991/12/23/4256

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