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Journal: Nanomaterials, 2022
Volume: 12
Number: 4256
Article:
Atomic-Level Sn Doping Effect in Ga2O3 Films Using Plasma-Enhanced Atomic Layer Deposition
Authors:
by
Yi Shen, Hong-Ping Ma, Lin Gu, Jie Zhang, Wei Huang, Jing-Tao Zhu and Qing-Chun Zhang
Link:
https://www.mdpi.com/2079-4991/12/23/4256
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