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Journal: Nanomaterials, 2022
Volume: 12
Number: 2836

Article: High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment
Authors: by Arjun Aryal, Isaac Stricklin, Mahmoud Behzadirad, Darren W. Branch, Aleem Siddiqui and Tito Busani
Link: https://www.mdpi.com/2079-4991/12/16/2836

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