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Zhao M-J, Zhang Z-X, Hsu C-H, Zhang X-Y, Wu W-Y, Lien S-Y, Zhu W-Z. Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy. Nanomaterials. 2021; 11(4):978. https://doi.org/10.3390/nano11040978

Zhao, Ming-Jie, Zhi-Xuan Zhang, Chia-Hsun Hsu, Xiao-Ying Zhang, Wan-Yu Wu, Shui-Yang Lien, and Wen-Zhang Zhu. 2021. "Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy" Nanomaterials 11, no. 4: 978. https://doi.org/10.3390/nano11040978

Zhao, M.-J., Zhang, Z.-X., Hsu, C.-H., Zhang, X.-Y., Wu, W.-Y., Lien, S.-Y., & Zhu, W.-Z. (2021). Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy. Nanomaterials, 11(4), 978. https://doi.org/10.3390/nano11040978