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Journal: Nanomaterials, 2021
Volume: 11
Number: 3296
3296
Article: Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO₂-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarization
Authors: by Seong-In Kim, Gi-Ppeum Jeong, Seung-Jae Lee, Jong-Chan Lee, Jun-Myeong Lee, Jin-Hyung Park, Jae-Young Bae and Jea-Gun Park
Link: https://www.mdpi.com/2079-4991/11/12/3296

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