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Journal: Nanomaterials, 2020
Volume: 10
Number: 459

Article: Zinc Oxide Films with High Transparency and Crystallinity Prepared by a Low Temperature Spatial Atomic Layer Deposition Process
Authors: by Ming-Jie Zhao, Zhi-Tao Sun, Chia-Hsun Hsu, Pao-Hsun Huang, Xiao-Ying Zhang, Wan-Yu Wu, Peng Gao, Yu Qiu, Shui-Yang Lien and Wen-Zhang Zhu
Link: https://www.mdpi.com/2079-4991/10/3/459

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