Silica-based membranes show both robust properties and high-permeability, offering us great potential for applying them to harsh conditions where conventional organic membranes cannot work. Despite the increasing number of paper and patents of silica-based membranes, their industrial applications have yet to be fully realized, possibly due to their lack of technologies on scaling-up and mass production. In particular, quality of membrane supports decisively impacts final quality of silica-based separation membranes. In this study, therefore, we have developed mass producing technologies of nano-porous supports (φ 12 mm, length 400 mm) with surface center pore size distribution of 1–10 nm, which are generally used as supports for preparing separation membranes with a pore size of less than 1 nm. The developed mass production apparatuses have enabled us to reproducibly produce nano-porous silica-based supports with high permeance (e.g., N2
permeance of more than 10−5
) minimizing effects of membrane defects less than 0.1% of the total flux. The developed nano-porous supports have enabled us to reproducibly produce silica-based separation membranes with high permeace and selectivity (e.g., H2
permeance of about 5 × 10−6
permeance ratio of more than 2000).
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