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Journal: Appl. Sci., 2019
Volume: 9
Number: 5133
Article:
3-D SRIM Simulation of Focused Ion Beam Sputtering with an Application-Oriented Incident Beam Model
Authors:
by
Lirong Zhao, Yimin Cui, Wenping Li, Wajid Ali Khan and Yutian Ma
Link:
https://www.mdpi.com/2076-3417/9/23/5133
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