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Journal: Appl. Sci., 2018
Volume: 8
Number: 1819

Article: Influence of Illumination Polarization and Target Structure on Measurement Sensitivity of Through-Focus Scanning Optical Microscopy
Authors: by Yufu Qu, Renju Peng, Jialin Hao, Hui Pan, Jiebin Niu and Jie Jiang
Link: https://www.mdpi.com/2076-3417/8/10/1819

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