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Journal: Appl. Sci., 2017
Volume: 7
Number: 56
Article:
Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia
Authors:
by
Hua-Wen Liu, Tai-Hong Chen, Chun-Hao Chang, Shao-Kai Lu, Yi-Cyuan Lin and Day-Shan Liu
Link:
https://www.mdpi.com/2076-3417/7/1/56
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