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Journal: Appl. Sci., 2023
Volume: 13
Number: 1538
Article:
Investigation of the Influence of Sublayer Thickness on Pairing of Metallic MEMS Shutter Blades
Authors:
by
Basma Elsaka, Philipp Kästner, Eireen Käkel, Roland Donatiello and Hartmut Hillmer
Link:
https://www.mdpi.com/2076-3417/13/3/1538
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