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Journal: Appl. Sci., 2023
Volume: 13
Number: 1295
Article:
Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithm
Authors:
by
Giovanni Niro, Ilaria Marasco, Francesco Rizzi, Antonella D’Orazio, Marco Grande and Massimo De Vittorio
Link:
https://www.mdpi.com/2076-3417/13/3/1295
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