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Journal: Appl. Sci., 2022
Volume: 12
Number: 10415
Article:
Controlled Surface Morphology and Electrical Properties of Sputtered Titanium Nitride Thin Film for Metal–Insulator–Metal Structures
Authors:
by
Viet Dongquoc, Dong-Bum Seo, Cao Viet Anh, Jae-Hyun Lee, Jun-Hong Park and Eui-Tae Kim
Link:
https://www.mdpi.com/2076-3417/12/20/10415
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