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Journal: Appl. Sci., 2021
Volume: 11
Number: 10872
Article:
Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge1Sb4Te5 Film Surface Chemical-Mechanical-Planarization
Authors:
by
Gi-Ppeum Jeong, Young-Hye Son, Jun-Seong Park, Pil-Su Kim, Man-Hyup Han, Seong-Wan Hong, Jin-Hyung Park, Hao Cui, Bo-Un Yoon and Jea-Gun Park
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https://www.mdpi.com/2076-3417/11/22/10872
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