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Journal: Appl. Sci., 2021
Volume: 11
Number: 9074
Article:
Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors
Authors:
by
Chia-Yen Lee, Cheng-Xue Yu, Kuan-Yu Lin and Lung-Ming Fu
Link:
https://www.mdpi.com/2076-3417/11/19/9074
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